MASCOT MANUAL LOADLOCK SYSTEM – 200,300,450
This high-vacuum compatible, single-substrate loadlock system is designed to manually load wafers or other flat substrates into a SEMI-standard or custom process chamber. The MASCOT can mimic the motions of a complex and costly robot but is convenient to use and significantly less costly.
Chambers are available for wafers or substrates up to 200mm, 300mm or 450mm. Optional items include vertical lift capability, heavy-duty cart for portability and limit switches. Chambers can be modified or customized for non-standard applications.
A Precision Magnetic Manipulator (PMM) is used as the transfer device on the MASCOT Loadlock system. See PMM description for complete specifications on these manipulators. A MASCOT-LO, with a linear-only PMM will precisely transfer a substrate into a process chamber where the receiving station has vertical lift capability to remove the substrate from a carrier on the end of the PMM. The MASCOT-LR uses a linear-rotary PMM where the rotation is actually used to operate a dynamic end effector with vertical motion capability to lift or lower a substrate during transfer. The PMM with a dynamic end effector can deliver a substrate to the process chamber and lower to set the substrate onto the receiving stage for processing. The PMM returns to lift the substrate and withdraw it into the loadlock chamber for removal after processing is complete.