Does your vacuum process chamber require integrated cooling?

Posted on: April 20, 2017

Vacuum systems often involve processes with significant heat output, requiring chambers with integrated cooling options. Applications with thermal management issues include: Vacuum Deposition (CVD, MOCVD, PVD and IBAD), Crystal Growth/Pulling, Space Simulation, and Vacuum Furnaces.

liquid cooled vacuum chamber

Double Wall Chamber

Double wall chamber designs are best for applications with very high heat loads. Separating chamber walls with baffles to promote flow or circulation provides the most effective method of heat removal from a system. The example shows inner and outer walls tacked, holes bored, and ready for ports to be welded.

Hyrdro-Formed Channels

Hyrdro-Formed Channels offer approximately 2X the surface area of conventional ‘C’ channels. Radius bends instead of corners improve flow and eliminate stagnant areas. Cooling channels are produced by welding a trace to a chamber, then using water pressure to form open flow paths. Full penetration welds at channel edges reduce the risk of cracks or corrosion, extending the working life of the chamber.

Welded Channels

Welded channels are sufficient for lower heat load systems. ‘C’ channels welded to a surface provide cooling paths. Channels that are milled into the wall thickness improve thermal transfer. The design parameters, cost impact, and effective cooling all vary by configuration.

Relative effectiveness of typical chamber cooling options:

Cooling Option Thermal Transfer Cost Effectiveness
Double Walled Very high Very Good
Machined in Trace High Good
Hydro-formed Channels High Good
Welded C Channel Moderate Average
Wrapped Tube Low Poor

Anderson Dahlen (ADI) – Applied Vacuum Division has more than 25 years experience designing and integrating cooling options for custom vacuum flanges and chambers. All chambers and components undergo pressure-testing for all cooling channels and cavities, as well as helium leak checking all internal and external welds.

Our manufacturing and quality systems are certified to ISO 9001:2008 and Nuclear Quality Assurance (NQA-1).